Problem asml SNF 2009-02-20 21:32:53: Initial Carrier Inspection Failed

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 27 13:50:05 PST 2009


Suspect that this was due to the laser for the wafer inspection sensor not being activated. Checked and retightened the hinges on output port (Port 3). Also adjusted the port cover latch( It was a bit too loose).  Tested carrier inspection several times. Looks OK now. Please continue to report any problems in coral.




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