Problem asml SNF 2009-02-20 21:42:35: Wafer Handling failed to re-initialise

gsosa at gsosa at
Fri Feb 27 13:51:19 PST 2009

Suspect that this was due to the laser for the wafer inspection sensor not being activated. Checked and retightened the hinges on output port (Port 3). Also adjusted the port cover latch( It was a bit too loose).  Tested carrier inspection several times. Looks OK now. Please continue to report any problems in coral.

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