From gsosa at snf.stanford.edu Mon Jan 5 16:36:36 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Jan 2009 16:36:36 -0800 Subject: Shutdown asml SNF 2009-01-05 16:36:36: PM in progress Message-ID: The Annual PM is in progress From gsosa at snf.stanford.edu Wed Jan 7 14:49:56 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 7 Jan 2009 14:49:56 -0800 Subject: Shutdown asml SNF 2009-01-05 16:36:36: PM in progress Message-ID: The annual PM is completed. Did a test wafer to verify alignment and system operation. All looks good. Stepper is up and ready to use. From yeh at snf.stanford.edu Fri Jan 9 12:35:08 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 9 Jan 2009 12:35:08 -0800 Subject: Comment asml SNF 2009-01-09 12:35:07: energy sensor temperature out of range Message-ID: got above warning while printing zero layer mask (combi) at 150mj/cm2. 18 wfs total. warning popped up thru-out. batch id: dsl-combi2. wfs printed fine. From mahnaz at snf.stanford.edu Wed Jan 14 14:27:55 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Jan 2009 14:27:55 -0800 Subject: Problem asml SNF 2009-01-14 14:27:54: right side pre aligner Message-ID: imonitor is acting up. From lindaohara at snf.stanford.edu Fri Jan 16 08:30:29 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 16 Jan 2009 08:30:29 -0800 Subject: Comment asml SNF 2009-01-16 08:30:28: Cree Demo Message-ID: From gsosa at snf.stanford.edu Fri Jan 16 10:49:07 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Jan 2009 10:49:07 -0800 Subject: Shutdown asml SNF 2009-01-16 10:49:06: ASML working on system Message-ID: FSE is working on wafer handling calibration issue. From gsosa at snf.stanford.edu Fri Jan 16 11:25:03 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Jan 2009 11:25:03 -0800 Subject: Shutdown asml SNF 2009-01-16 10:49:06: ASML working on system Message-ID: Vendor has completed work on the system. . From shott at snf.stanford.edu Tue Jan 20 07:27:45 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:45 -0800 Subject: Comment asml SNF 2007-12-08 19:30:27: Stepper Status Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:51 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:51 -0800 Subject: Comment asml SNF 2007-12-09 13:17:56: Stepper Update Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:57 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:57 -0800 Subject: Comment asml SNF 2008-01-04 12:10:18: Stepper is up Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:02 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:02 -0800 Subject: Comment asml SNF 2008-01-23 15:16:28: 400nm lines not resolving Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:07 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:07 -0800 Subject: Comment asml SNF 2008-02-01 11:46:45: E-Chuck cleaned Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:12 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:12 -0800 Subject: Comment asml SNF 2008-02-18 10:27:40: Logfile full. Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:17 -0800 Subject: Comment asml SNF 2008-02-21 08:20:41: asml Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:22 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:22 -0800 Subject: Comment asml SNF 2008-03-20 10:05:41: ADC Collection and CID option installation Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:27 -0800 Subject: Comment asml SNF 2008-03-21 09:57:42: CID options installation Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:32 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:32 -0800 Subject: Comment asml SNF 2008-04-02 09:34:50: ASML Schedule today Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:37 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:37 -0800 Subject: Comment asml SNF 2008-04-02 13:05:50: Weekly data collection Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:42 -0800 Subject: Comment asml SNF 2008-04-02 13:29:16: Status change 4/2 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:46 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:46 -0800 Subject: Comment asml SNF 2008-04-03 11:41:07: Focus Check Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:28:58 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:28:58 -0800 Subject: Comment asml SNF 2008-04-03 15:49:31: ASM-L Status Update 4/3 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:03 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:03 -0800 Subject: Comment asml SNF 2008-04-14 08:22:52: gary cleared the wafers Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:07 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:07 -0800 Subject: Comment asml SNF 2008-04-18 15:06:39: Tool Update 4/18 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:12 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:12 -0800 Subject: Comment asml SNF 2008-04-19 23:47:44: Update 4/19/08 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:17 -0800 Subject: Comment asml SNF 2008-04-25 21:15:42: Tool Status 4/25/2008 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:21 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:21 -0800 Subject: Comment asml SNF 2008-04-28 20:00:54: Tool status 4/28/2008 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:27 -0800 Subject: Comment asml SNF 2008-06-03 10:16:12: Energy sensor temperature error Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:32 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:32 -0800 Subject: Comment asml SNF 2008-06-06 14:18:01: Stepper is up 6/6/08 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:37 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:37 -0800 Subject: Comment asml SNF 2008-06-19 10:05:22: down time Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:43 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:43 -0800 Subject: Comment asml SNF 2008-06-20 18:26:17: Stepper Status 6/20/08 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:48 -0800 Subject: Comment asml SNF 2008-06-21 22:53:59: Cylinder change Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:29:53 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:29:53 -0800 Subject: Comment asml SNF 2008-06-21 22:54:40: SYstem up Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:00 -0800 Subject: Comment asml SNF 2008-07-31 17:15:49: black handle are broken Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:05 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:05 -0800 Subject: Comment asml SNF 2008-08-14 14:27:02: Lamp change Completed Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:09 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:09 -0800 Subject: Comment asml SNF 2008-08-18 17:50:36: Update 8/18/2008 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:15 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:15 -0800 Subject: Comment asml SNF 2008-08-19 16:19:47: Tool Update 8/19/2008 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:20 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:20 -0800 Subject: Comment asml SNF 2008-08-26 16:40:39: Wafer stuck in machine Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:25 -0800 Subject: Comment asml SNF 2008-09-02 15:35:40: Uniformity Issue Update Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:31 -0800 Subject: Problem asml SNF 2008-09-04 16:04:39: NEED to do a test wafer Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:36 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:36 -0800 Subject: Comment asml SNF 2008-09-09 16:15:38: Uniformity Update 9/9 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:42 -0800 Subject: Comment asml SNF 2008-09-11 15:42:25: PM completed Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:48 -0800 Subject: Comment asml SNF 2008-09-15 12:57:28: ust do Exposure matrix Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:53 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:53 -0800 Subject: Problem asml SNF 2008-09-18 11:04:39: exposure matrix Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:30:58 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:30:58 -0800 Subject: Comment asml SNF 2008-09-25 12:57:17: Uniformity Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:03 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:03 -0800 Subject: Problem asml SNF 2008-10-02 17:14:27: Energy sensor temperature out of range Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:09 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:09 -0800 Subject: Problem asml SNF 2008-10-06 19:21:38: the machine miss-aligns my wafer by >10um Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:13 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:13 -0800 Subject: Comment asml SNF 2008-10-08 15:18:15: System still stabilizing Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:20 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:20 -0800 Subject: Comment asml SNF 2008-10-08 18:23:39: Tool update Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:25 -0800 Subject: Problem asml SNF 2008-11-04 20:58:48: energy sensor Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:31 -0800 Subject: Problem asml SNF 2008-11-05 01:26:23: trouble with manual pre-align Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:37 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:37 -0800 Subject: Problem asml SNF 2008-11-06 00:41:53: energy sensor temperature out of range Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:43 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:43 -0800 Subject: Comment asml SNF 2008-11-14 08:40:47: Stuck Wafers Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:31:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:31:48 -0800 Subject: Comment asml SNF 2008-11-14 08:56:17: Stuck wafers Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:00 -0800 Subject: Problem asml SNF 2008-11-15 15:02:47: encountered "energy sensor temp out of range" several times Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:32:08 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:32:08 -0800 Subject: Comment asml SNF 2009-01-09 12:35:07: energy sensor temperature out of range Message-ID: To the archives ... From lindaohara at snf.stanford.edu Wed Jan 21 09:43:53 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 21 Jan 2009 09:43:53 -0800 Subject: Comment asml SNF 2009-01-21 09:43:52: Patches for 9.0 Message-ID: FSE installing patches for 9.0 From lindaohara at snf.stanford.edu Wed Jan 21 09:46:08 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 21 Jan 2009 09:46:08 -0800 Subject: Problem asml SNF 2009-01-14 14:27:54: right side pre aligner Message-ID: From rostam at snf.stanford.edu Sun Jan 25 22:57:27 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 25 Jan 2009 22:57:27 -0800 Subject: Problem asml SNF 2009-01-25 22:57:27: can't expose Message-ID: I wanted to expose a layer without doing any alignment. In the 'Define Batch' section, I clicked on alignment and changed the alignment option from D to Z (=zero). I exposed one wafer. Everything was fine. Then I changed the optical prealignment to None as well. I tried to expose another wafer, but it was rejected. I changed the optical prealignment back to D (=Default). My wafer was rejected again. I wanted to change back everything to the original state. However, the alignment option (the one that had Zero, Default as its values) isn't in the alignment page any more. That's strange. Do you know what happened? From gsosa at snf.stanford.edu Tue Jan 27 07:29:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 27 Jan 2009 07:29:04 -0800 Subject: Problem asml SNF 2009-01-25 22:57:27: can't expose Message-ID: User did a full startup of system and retried his wafers. Wafers processed with no problem. From gsosa at snf.stanford.edu Wed Jan 28 13:01:18 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 28 Jan 2009 13:01:18 -0800 Subject: Problem asml SNF 2009-01-28 13:01:18: Right side monitor non-op Message-ID: The right side monitor on the operator control console does not work. Replaced a burned out bulb for the Pre-alignmnet microscope, reset the software, reset all subsystem CPU's . Still same problem. Possible video switch or monitor problem. FSE will investigate further, at a later time. System is still usable, but you will not see your pre-alignment images.. From chen0622 at snf.stanford.edu Wed Jan 28 17:44:00 2009 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Wed, 28 Jan 2009 17:44:00 -0800 Subject: Problem asml SNF 2009-01-28 17:43:59: screen freezed during modifying the job file. Message-ID: Nishant (nppatil) said he would restart the program later. From gsosa at snf.stanford.edu Thu Jan 29 10:54:01 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 29 Jan 2009 10:54:01 -0800 Subject: Problem asml SNF 2009-01-28 17:43:59: screen freezed during modifying the job file. Message-ID: The system is OK. Problem resolved by user.