Comment asml SNF 2009-01-09 12:35:07: energy sensor temperature out of range

yeh at snf.stanford.edu yeh at snf.stanford.edu
Fri Jan 9 12:35:08 PST 2009


got above warning while printing zero layer mask (combi) at 150mj/cm2. 18 wfs total.  warning popped up thru-out.  batch id: dsl-combi2.  wfs printed fine.




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