January 2009 Archives by date

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Starting: Mon Jan 5 16:36:36 PST 2009
Ending: Thu Jan 29 10:54:01 PST 2009
Messages: 62

• Shutdown asml SNF 2009-01-05 16:36:36: PM in progress   gsosa at snf.stanford.edu
• Shutdown asml SNF 2009-01-05 16:36:36: PM in progress   gsosa at snf.stanford.edu
• Comment asml SNF 2009-01-09 12:35:07: energy sensor temperature out of range   yeh at snf.stanford.edu
• Problem asml SNF 2009-01-14 14:27:54: right side pre aligner   mahnaz at snf.stanford.edu
• Comment asml SNF 2009-01-16 08:30:28: Cree Demo   lindaohara at snf.stanford.edu
• Shutdown asml SNF 2009-01-16 10:49:06: ASML working on system   gsosa at snf.stanford.edu
• Shutdown asml SNF 2009-01-16 10:49:06: ASML working on system   gsosa at snf.stanford.edu
• Comment asml SNF 2007-12-08 19:30:27: Stepper Status   shott at snf.stanford.edu
• Comment asml SNF 2007-12-09 13:17:56: Stepper Update   shott at snf.stanford.edu
• Comment asml SNF 2008-01-04 12:10:18: Stepper is up   shott at snf.stanford.edu
• Comment asml SNF 2008-01-23 15:16:28: 400nm lines not resolving   shott at snf.stanford.edu
• Comment asml SNF 2008-02-01 11:46:45: E-Chuck cleaned   shott at snf.stanford.edu
• Comment asml SNF 2008-02-18 10:27:40: Logfile full.   shott at snf.stanford.edu
• Comment asml SNF 2008-02-21 08:20:41: asml   shott at snf.stanford.edu
• Comment asml SNF 2008-03-20 10:05:41: ADC Collection and CID option installation   shott at snf.stanford.edu
• Comment asml SNF 2008-03-21 09:57:42: CID options installation   shott at snf.stanford.edu
• Comment asml SNF 2008-04-02 09:34:50: ASML Schedule today   shott at snf.stanford.edu
• Comment asml SNF 2008-04-02 13:05:50: Weekly data collection   shott at snf.stanford.edu
• Comment asml SNF 2008-04-02 13:29:16: Status change 4/2   shott at snf.stanford.edu
• Comment asml SNF 2008-04-03 11:41:07: Focus Check   shott at snf.stanford.edu
• Comment asml SNF 2008-04-03 15:49:31: ASM-L Status Update 4/3   shott at snf.stanford.edu
• Comment asml SNF 2008-04-14 08:22:52: gary cleared the wafers   shott at snf.stanford.edu
• Comment asml SNF 2008-04-18 15:06:39: Tool Update 4/18   shott at snf.stanford.edu
• Comment asml SNF 2008-04-19 23:47:44: Update 4/19/08   shott at snf.stanford.edu
• Comment asml SNF 2008-04-25 21:15:42: Tool Status 4/25/2008   shott at snf.stanford.edu
• Comment asml SNF 2008-04-28 20:00:54: Tool status 4/28/2008   shott at snf.stanford.edu
• Comment asml SNF 2008-06-03 10:16:12: Energy sensor temperature error   shott at snf.stanford.edu
• Comment asml SNF 2008-06-06 14:18:01: Stepper is up 6/6/08   shott at snf.stanford.edu
• Comment asml SNF 2008-06-19 10:05:22: down time   shott at snf.stanford.edu
• Comment asml SNF 2008-06-20 18:26:17: Stepper Status 6/20/08   shott at snf.stanford.edu
• Comment asml SNF 2008-06-21 22:53:59: Cylinder change   shott at snf.stanford.edu
• Comment asml SNF 2008-06-21 22:54:40: SYstem up   shott at snf.stanford.edu
• Comment asml SNF 2008-07-31 17:15:49: black handle are broken   shott at snf.stanford.edu
• Comment asml SNF 2008-08-14 14:27:02: Lamp change Completed   shott at snf.stanford.edu
• Comment asml SNF 2008-08-18 17:50:36: Update 8/18/2008   shott at snf.stanford.edu
• Comment asml SNF 2008-08-19 16:19:47: Tool Update 8/19/2008   shott at snf.stanford.edu
• Comment asml SNF 2008-08-26 16:40:39: Wafer stuck in machine   shott at snf.stanford.edu
• Comment asml SNF 2008-09-02 15:35:40: Uniformity Issue Update   shott at snf.stanford.edu
• Problem asml SNF 2008-09-04 16:04:39: NEED to do a test wafer   shott at snf.stanford.edu
• Comment asml SNF 2008-09-09 16:15:38: Uniformity Update 9/9   shott at snf.stanford.edu
• Comment asml SNF 2008-09-11 15:42:25: PM completed   shott at snf.stanford.edu
• Comment asml SNF 2008-09-15 12:57:28: ust do Exposure matrix   shott at snf.stanford.edu
• Problem asml SNF 2008-09-18 11:04:39: exposure matrix   shott at snf.stanford.edu
• Comment asml SNF 2008-09-25 12:57:17: Uniformity   shott at snf.stanford.edu
• Problem asml SNF 2008-10-02 17:14:27: Energy sensor temperature out of range   shott at snf.stanford.edu
• Problem asml SNF 2008-10-06 19:21:38: the machine miss-aligns my wafer by >10um   shott at snf.stanford.edu
• Comment asml SNF 2008-10-08 15:18:15: System still stabilizing   shott at snf.stanford.edu
• Comment asml SNF 2008-10-08 18:23:39: Tool update   shott at snf.stanford.edu
• Problem asml SNF 2008-11-04 20:58:48: energy sensor   shott at snf.stanford.edu
• Problem asml SNF 2008-11-05 01:26:23: trouble with manual pre-align   shott at snf.stanford.edu
• Problem asml SNF 2008-11-06 00:41:53: energy sensor temperature out of range   shott at snf.stanford.edu
• Comment asml SNF 2008-11-14 08:40:47: Stuck Wafers   shott at snf.stanford.edu
• Comment asml SNF 2008-11-14 08:56:17: Stuck wafers   shott at snf.stanford.edu
• Problem asml SNF 2008-11-15 15:02:47: encountered "energy sensor temp out of range" several times   shott at snf.stanford.edu
• Comment asml SNF 2009-01-09 12:35:07: energy sensor temperature out of range   shott at snf.stanford.edu
• Comment asml SNF 2009-01-21 09:43:52: Patches for 9.0   lindaohara at snf.stanford.edu
• Problem asml SNF 2009-01-14 14:27:54: right side pre aligner   lindaohara at snf.stanford.edu
• Problem asml SNF 2009-01-25 22:57:27: can't expose   rostam at snf.stanford.edu
• Problem asml SNF 2009-01-25 22:57:27: can't expose   gsosa at snf.stanford.edu
• Problem asml SNF 2009-01-28 13:01:18: Right side monitor non-op   gsosa at snf.stanford.edu
• Problem asml SNF 2009-01-28 17:43:59: screen freezed during modifying the job file.   chen0622 at snf.stanford.edu
• Problem asml SNF 2009-01-28 17:43:59: screen freezed during modifying the job file.   gsosa at snf.stanford.edu

Last message date: Thu Jan 29 10:54:01 PST 2009
Archived on: Sun Dec 23 08:44:13 PST 2012

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