From lindaohara at snf.stanford.edu Wed Jul 1 08:15:31 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 1 Jul 2009 08:15:31 -0700 Subject: Shutdown asml SNF 2009-07-01 08:15:30: 3" Demo Message-ID: Doing 3" Demo From gsosa at snf.stanford.edu Wed Jul 1 14:51:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 1 Jul 2009 14:51:53 -0700 Subject: Shutdown asml SNF 2009-07-01 08:15:30: 3" Demo Message-ID: 3 inch demo work completed for today From lindaohara at snf.stanford.edu Thu Jul 2 12:51:00 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 2 Jul 2009 12:51:00 -0700 Subject: Comment asml SNF 2009-07-02 12:51:00: Deleted reservation 13:00 to 14:00 Message-ID: From gth at snf.stanford.edu Sun Jul 5 22:54:08 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 5 Jul 2009 22:54:08 -0700 Subject: Problem asml SNF 2009-07-05 22:54:07: log file is full ? Message-ID: Please check this message on the terminal. From gsosa at snf.stanford.edu Mon Jul 6 08:14:38 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 6 Jul 2009 08:14:38 -0700 Subject: Problem asml SNF 2009-07-05 22:54:07: log file is full ? Message-ID: opened new logfile From gsosa at snf.stanford.edu Tue Jul 7 09:29:27 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 7 Jul 2009 09:29:27 -0700 Subject: Shutdown asml SNF 2009-07-07 09:29:26: Image tilt Message-ID: IQC test indicates an image tilt of > 10 Urad. System software unable to correct for this amount( Corrtection window is +/- 10 Urad) . Need FSE to look at tool. From joho at snf.stanford.edu Tue Jul 7 13:18:25 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 7 Jul 2009 13:18:25 -0700 Subject: Shutdown asml SNF 2009-07-07 09:29:26: Image tilt Message-ID: maintenace ran a hotspot and saw no major image tilt, redefined reference state to fix drft data. will monitor From lindaohara at snf.stanford.edu Wed Jul 15 09:49:02 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 15 Jul 2009 09:49:02 -0700 Subject: Comment asml SNF 2009-07-15 09:49:02: Release tool 10:00 to 14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Jul 15 10:57:59 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 15 Jul 2009 10:57:59 -0700 Subject: Comment asml SNF 2009-07-15 10:57:58: Tool is available until 13:00 Message-ID: From damodei at snf.stanford.edu Wed Jul 15 17:02:03 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Wed, 15 Jul 2009 17:02:03 -0700 Subject: Comment asml SNF 2009-07-15 17:02:02: stage error Message-ID: System periodically reports a stage error and rejects wafers after partial exposure. From joey.minh.ho at asml.com Wed Jul 15 17:09:34 2009 From: joey.minh.ho at asml.com (Joey Ho) Date: Wed, 15 Jul 2009 20:09:34 -0400 Subject: Comment asml SNF 2009-07-15 17:02:02: stage error In-Reply-To: <20090716000203.B45CF18FBC4@smtp5.stanford.edu> References: <20090716000203.B45CF18FBC4@smtp5.stanford.edu> Message-ID: <06074762BB38DC48B93C60F730B5AFA64716154E@USWILX884.sn-us.asml.com> Would you happen to know if it was a Wafer Stage error or a Reticle Stage error? Were you the first person on the tool since ASML released it at 3 PM today? I'll be in tomorrow morning at 7 AM to check on the tool. Regards, Joey ASML CS Engineer (925) 408-9523 -----Original Message----- From: damodei at snf.stanford.edu [mailto:damodei at snf.stanford.edu] Sent: Wednesday, July 15, 2009 5:02 PM To: asml-pcs at snf.stanford.edu Subject: Comment asml SNF 2009-07-15 17:02:02: stage error System periodically reports a stage error and rejects wafers after partial exposure. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From lindaohara at snf.stanford.edu Fri Jul 17 09:08:48 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 17 Jul 2009 09:08:48 -0700 Subject: Comment asml SNF 2009-07-17 09:08:47: ASML 3" Test Message-ID: From lindaohara at snf.stanford.edu Fri Jul 17 13:45:38 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 17 Jul 2009 13:45:38 -0700 Subject: Comment asml SNF 2009-07-17 09:08:47: ASML 3" Test Message-ID: From lindaohara at snf.stanford.edu Fri Jul 17 13:46:07 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 17 Jul 2009 13:46:07 -0700 Subject: Comment asml SNF 2009-07-17 13:46:07: ASML OK to use Message-ID: From ericp at snf.stanford.edu Sat Jul 18 22:32:18 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 18 Jul 2009 22:32:18 -0700 Subject: Problem asml SNF 2009-07-18 22:32:17: mask stuck Message-ID: Tried to run and got mask error with only two options. Clicked continue. then tried to unlock the box, wouldn't do it, gave error. Mask is inside the system. From ericp at snf.stanford.edu Sun Jul 19 17:49:52 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 19 Jul 2009 17:49:52 -0700 Subject: Comment asml SNF 2009-07-19 17:49:51: Nishant recovered mask Message-ID: Nishant unloaded my mask. Thank you. From gsosa at snf.stanford.edu Mon Jul 20 08:52:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Jul 2009 08:52:00 -0700 Subject: Problem asml SNF 2009-07-18 22:32:17: mask stuck Message-ID: System recovered by user. From gsosa at snf.stanford.edu Mon Jul 20 08:52:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Jul 2009 08:52:13 -0700 Subject: Comment asml SNF 2009-07-19 17:49:51: Nishant recovered mask Message-ID: System recovered by user. From lindaohara at snf.stanford.edu Tue Jul 21 12:02:07 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 21 Jul 2009 12:02:07 -0700 Subject: Comment asml SNF 2009-07-21 12:02:06: Released Reservation 12:00-14:00 Message-ID: From ericp at snf.stanford.edu Mon Jul 27 23:43:50 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 27 Jul 2009 23:43:50 -0700 Subject: Problem asml SNF 2009-07-27 23:43:49: numerous "Input carrier missing" errors Message-ID: Machine was enabled, carriers in place, but error came up numerous times. Switch is getting flakey? From lindaohara at snf.stanford.edu Thu Jul 30 08:55:42 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 30 Jul 2009 08:55:42 -0700 Subject: Comment asml SNF 2009-07-30 08:55:41: 3" Demo Message-ID: From lindaohara at snf.stanford.edu Thu Jul 30 14:58:17 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 30 Jul 2009 14:58:17 -0700 Subject: Shutdown asml SNF 2009-07-30 14:58:16: ASML Down Message-ID: From lindaohara at snf.stanford.edu Thu Jul 30 15:54:56 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 30 Jul 2009 15:54:56 -0700 Subject: Shutdown asml SNF 2009-07-30 14:58:16: ASML Down Message-ID: From lindaohara at snf.stanford.edu Thu Jul 30 16:34:10 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 30 Jul 2009 16:34:10 -0700 Subject: Comment asml SNF 2009-07-30 16:34:10: ASML UP Okay to use Message-ID: From lindaohara at snf.stanford.edu Fri Jul 31 11:38:01 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 31 Jul 2009 11:38:01 -0700 Subject: Comment asml SNF 2009-07-31 11:38:01: 3" Demo Message-ID: From lindaohara at snf.stanford.edu Fri Jul 31 14:02:57 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 31 Jul 2009 14:02:57 -0700 Subject: Comment asml SNF 2009-07-31 14:02:56: Hotspot Message-ID: Hotspot on 2 areas of the wafer. cleaned e-chuck From lindaohara at snf.stanford.edu Fri Jul 31 16:01:25 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 31 Jul 2009 16:01:25 -0700 Subject: Comment asml SNF 2009-07-31 16:01:25: ASML UP Okay to Use Message-ID: