Shutdown asml SNF 2009-07-07 09:29:26: Image tilt

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Jul 7 09:29:27 PDT 2009


IQC test indicates an image tilt of > 10 Urad. System software unable to correct for this amount( Corrtection window is +/- 10 Urad) . Need FSE to look at tool.




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