Comment asml SNF 2009-07-15 17:02:02: stage error
joey.minh.ho at asml.com
Wed Jul 15 17:09:34 PDT 2009
Would you happen to know if it was a Wafer Stage error or a Reticle Stage error?
Were you the first person on the tool since ASML released it at 3 PM today?
I'll be in tomorrow morning at 7 AM to check on the tool.
ASML CS Engineer
From: damodei at snf.stanford.edu [mailto:damodei at snf.stanford.edu]
Sent: Wednesday, July 15, 2009 5:02 PM
To: asml-pcs at snf.stanford.edu
Subject: Comment asml SNF 2009-07-15 17:02:02: stage error
System periodically reports a stage error and rejects wafers after partial exposure.
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