Comment asml SNF 2009-07-15 17:02:02: stage error

Joey Ho joey.minh.ho at
Wed Jul 15 17:09:34 PDT 2009

Would you happen to know if it was a Wafer Stage error or a Reticle Stage error? 
Were you the first person on the tool since ASML released it at 3 PM today?

I'll be in tomorrow morning at 7 AM to check on the tool.

ASML CS Engineer
(925) 408-9523

-----Original Message-----
From: damodei at [mailto:damodei at] 
Sent: Wednesday, July 15, 2009 5:02 PM
To: asml-pcs at
Subject: Comment asml SNF 2009-07-15 17:02:02: stage error

System periodically reports a stage error and rejects wafers after partial exposure.

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