From gsosa at snf.stanford.edu Tue Jun 2 08:31:14 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Jun 2009 08:31:14 -0700 Subject: Shutdown asml SNF 2009-06-02 08:31:14: Monthly PM Message-ID: Monthly PM in progress From lindaohara at snf.stanford.edu Tue Jun 2 15:32:24 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 2 Jun 2009 15:32:24 -0700 Subject: Comment asml SNF 2009-06-02 15:32:24: Up Message-ID: Test Quals okay,up From lindaohara at snf.stanford.edu Tue Jun 2 15:34:35 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 2 Jun 2009 15:34:35 -0700 Subject: Shutdown asml SNF 2009-06-02 08:31:14: Monthly PM Message-ID: Okay to use, test quals ok From gsosa at snf.stanford.edu Wed Jun 3 10:36:14 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Jun 2009 10:36:14 -0700 Subject: Shutdown asml SNF 2009-06-03 10:36:13: Monthly PM Message-ID: Continuation of monthly PM From lindaohara at snf.stanford.edu Wed Jun 3 14:57:30 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 3 Jun 2009 14:57:30 -0700 Subject: Shutdown asml SNF 2009-06-03 10:36:13: Monthly PM Message-ID: monthly pm completed. Test Quals good. Ok to use From gsosa at snf.stanford.edu Wed Jun 3 17:10:08 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Jun 2009 17:10:08 -0700 Subject: Shutdown asml SNF 2009-06-03 17:10:07: Exposure Problem Message-ID: Exposure problem. Will have FSE look at tool tomorrow. From lindaohara at snf.stanford.edu Thu Jun 4 13:43:20 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 4 Jun 2009 13:43:20 -0700 Subject: Shutdown asml SNF 2009-06-03 17:10:07: Exposure Problem Message-ID: Exposed Pm marks on ASML and SNF wafers, both good. okay to use From lindaohara at snf.stanford.edu Sun Jun 7 16:55:37 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sun, 7 Jun 2009 16:55:37 -0700 Subject: Comment asml SNF 2009-06-07 16:55:36: Okay to use Message-ID: Did Quals and Okay to use From gsosa at snf.stanford.edu Sun Jun 7 17:44:26 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sun, 7 Jun 2009 17:44:26 -0700 Subject: Comment asml SNF 2009-06-07 17:44:26: System OK to Use Message-ID: ASM-L completed 3" testing on the tool. System is back up and ready to use. From joho at snf.stanford.edu Tue Jun 16 08:16:08 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 16 Jun 2009 08:16:08 -0700 Subject: Comment asml SNF 2009-06-16 08:16:07: asml RR Message-ID: Remove and Replace Ellipsoidal Mirror From lindaohara at snf.stanford.edu Tue Jun 16 08:39:46 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 16 Jun 2009 08:39:46 -0700 Subject: Shutdown asml SNF 2009-06-16 08:39:45: ASML RR Message-ID: From joho at snf.stanford.edu Tue Jun 16 13:23:47 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 16 Jun 2009 13:23:47 -0700 Subject: Shutdown asml SNF 2009-06-16 08:39:45: ASML RR Message-ID: System is up, uniformity is OK now From riteshj at snf.stanford.edu Tue Jun 16 21:25:16 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 16 Jun 2009 21:25:16 -0700 Subject: Problem asml SNF 2009-06-16 21:25:15: system error : abort Message-ID: It took extremely long (about 5-7 mins) to go from the p-chuck to e-chuck and then the wafre just stopped there. No alignment or anythign happeneing. After 5 mins it aborted saying system error: abort: clear stepper. previous users also experineced this problem. From riteshj at snf.stanford.edu Tue Jun 16 21:44:50 2009 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 16 Jun 2009 21:44:50 -0700 Subject: Problem asml SNF 2009-06-16 21:44:50: Previous problem ok after reboot Message-ID: From lindaohara at snf.stanford.edu Wed Jun 17 07:57:00 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Jun 2009 07:57:00 -0700 Subject: Comment asml SNF 2009-06-17 07:57:00: ASML 3D Calibration Message-ID: From lindaohara at snf.stanford.edu Wed Jun 17 10:39:15 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Jun 2009 10:39:15 -0700 Subject: Shutdown asml SNF 2009-06-17 10:39:14: 3D Calibration ASML Message-ID: From lindaohara at snf.stanford.edu Wed Jun 17 12:00:01 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:00:01 -0700 Subject: Shutdown asml SNF 2009-06-17 10:39:14: 3D Calibration ASML Message-ID: From linda.ohara at asml.com Wed Jun 17 12:39:08 2009 From: linda.ohara at asml.com (Linda Ohara) Date: Wed, 17 Jun 2009 15:39:08 -0400 Subject: RE Shutdown asml SNF 2009-06-17 10:39:14: 3D Calibration ASML Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE029AF9E9@USWILX884.sn-us.asml.com> Okay to use. -----Original Message----- From: lindaohara at snf.stanford.edu [mailto:lindaohara at snf.stanford.edu] Sent: Wednesday, June 17, 2009 12:00 PM To: asml-pcs at snf.stanford.edu Subject: Re: Shutdown asml SNF 2009-06-17 10:39:14: 3D Calibration ASML -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From lindaohara at snf.stanford.edu Thu Jun 18 11:41:01 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 18 Jun 2009 11:41:01 -0700 Subject: Comment asml SNF 2009-06-18 11:41:01: ASML 3D Calibration Message-ID: Doing 3D Calibration -Linda/Joey From cursive at snf.stanford.edu Fri Jun 19 14:31:18 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:31:18 -0700 Subject: Shutdown asml SNF 2009-06-19 14:31:18: staff will check the problem of alignment Message-ID: The staff will check the problem of alignment after 2:30pm. Hope it'll back on line soon. From gsosa at snf.stanford.edu Fri Jun 19 14:49:22 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:49:22 -0700 Subject: Shutdown asml SNF 2009-06-19 14:49:22: Edge sensor problem Message-ID: ASM-L FSE is here to look at wafer edge sensor problem at pre-aligner From gsosa at snf.stanford.edu Fri Jun 19 16:19:21 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Jun 2009 16:19:21 -0700 Subject: Shutdown asml SNF 2009-06-19 14:31:18: staff will check the problem of alignment Message-ID: Edge sensor, mark sensor repro in spec after calibrations. System is OK to use. From gsosa at snf.stanford.edu Fri Jun 19 16:19:29 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Jun 2009 16:19:29 -0700 Subject: Shutdown asml SNF 2009-06-19 14:49:22: Edge sensor problem Message-ID: Edge sensor, mark sensor repro in spec after calibrations. System is OK to use. From mtang at snf.stanford.edu Mon Jun 22 09:33:47 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 22 Jun 2009 09:33:47 -0700 Subject: Problem asml SNF 2009-06-16 21:25:15: system error : abort Message-ID: Resolved after reboot. From mtang at snf.stanford.edu Mon Jun 22 09:34:02 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 22 Jun 2009 09:34:02 -0700 Subject: Problem asml SNF 2009-06-16 21:44:50: Previous problem ok after reboot Message-ID: Resolved after reboot. From gsosa at snf.stanford.edu Mon Jun 22 10:11:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 10:11:11 -0700 Subject: Problem asml SNF 2009-05-17 22:36:47: Carrier Inspection Errors and Alignment Marks Message-ID: System OK From gsosa at snf.stanford.edu Mon Jun 22 10:11:27 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 10:11:27 -0700 Subject: Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed Message-ID: System OK From gsosa at snf.stanford.edu Mon Jun 22 10:11:58 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 10:11:58 -0700 Subject: Comment asml SNF 2009-05-11 09:35:28: System is down Message-ID: System OK From gsosa at snf.stanford.edu Mon Jun 22 10:12:33 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 10:12:33 -0700 Subject: Comment asml SNF 2009-05-22 00:00:41: Output casette chipped Message-ID: From gsosa at snf.stanford.edu Mon Jun 22 15:03:31 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:03:31 -0700 Subject: Comment asml SNF 2009-03-31 15:14:12: PM Update 033109 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:03:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:03:53 -0700 Subject: Comment asml SNF 2009-04-02 14:40:13: Cleaned the E-Chuck 040209 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:04 -0700 Subject: Comment asml SNF 2009-04-08 14:11:41: y-shift problem Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:11 -0700 Subject: Comment asml SNF 2009-04-08 14:15:12: Hotspot 040709 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:23 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:23 -0700 Subject: Comment asml SNF 2009-04-09 15:53:58: Update 4/9/09 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:29 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:29 -0700 Subject: Comment asml SNF 2009-04-13 14:55:48: purge hood install Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:35 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:35 -0700 Subject: Comment asml SNF 2009-04-14 18:08:02: System OK 4/14 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:42 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:42 -0700 Subject: Comment asml SNF 2009-04-18 01:27:54: GUI froze Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:47 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:47 -0700 Subject: Comment asml SNF 2009-04-23 14:41:38: System is up Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:04:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:04:53 -0700 Subject: Comment asml SNF 2009-04-24 15:43:34: Stepper Update 4/24 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:05:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:05:04 -0700 Subject: Comment asml SNF 2009-04-28 16:13:39: System is up Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:05:08 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:05:08 -0700 Subject: Comment asml SNF 2009-04-28 18:30:16: Scheduled Downtime Note Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:05:17 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:05:17 -0700 Subject: Comment asml SNF 2009-05-02 07:40:42: misalignment issue? Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:05:30 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:05:30 -0700 Subject: Comment asml SNF 2009-05-11 13:21:33: 3"demo Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:05:38 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:05:38 -0700 Subject: Comment asml SNF 2009-05-11 15:02:33: Status Update 5/11/09 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:05:44 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:05:44 -0700 Subject: Comment asml SNF 2009-05-13 10:21:28: Hotspot 051309 Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:06:10 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:06:10 -0700 Subject: Problem asml SNF 2009-05-15 19:21:11: Please shoot test wafer Message-ID: Clear From gsosa at snf.stanford.edu Mon Jun 22 15:06:31 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:06:31 -0700 Subject: Comment asml SNF 2009-05-18 12:44:12: Hotspot Message-ID: Clear From lindaohara at snf.stanford.edu Tue Jun 23 12:32:36 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 23 Jun 2009 12:32:36 -0700 Subject: Shutdown asml SNF 2009-06-23 12:32:36: motion board not working Message-ID: From gsosa at snf.stanford.edu Tue Jun 23 14:22:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 23 Jun 2009 14:22:28 -0700 Subject: Shutdown asml SNF 2009-06-23 12:32:36: motion board not working Message-ID: ASML FSE swapped motion control PCB for wafer stage. System is OK now. From gsosa at snf.stanford.edu Wed Jun 24 14:25:44 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 24 Jun 2009 14:25:44 -0700 Subject: Problem asml SNF 2009-06-24 14:25:44: 6^ Inch conversion Message-ID: The stepper has been converted to 6" wafer size and will remain in 6" until tomorrow afternoon. The stepper is down for 4 inch wafer processing until tomorrow afternoon From lindaohara at snf.stanford.edu Thu Jun 25 14:22:18 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 25 Jun 2009 14:22:18 -0700 Subject: Problem asml SNF 2009-06-24 14:25:44: 6^ Inch conversion Message-ID: Back to 4 inch. Quals are good. okay to use. From lindaohara at snf.stanford.edu Mon Jun 29 08:08:59 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 29 Jun 2009 08:08:59 -0700 Subject: Shutdown asml SNF 2009-06-29 08:08:57: Quarterly PM & Purge hood installation Message-ID: From linda.ohara at asml.com Mon Jun 29 14:46:46 2009 From: linda.ohara at asml.com (Linda Ohara) Date: Mon, 29 Jun 2009 17:46:46 -0400 Subject: ASML will be up at 4:00pm today Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE025EF52013@USWILX884.sn-us.asml.com> Hello, The ASML will be up at 16:00 today. You could use the system this evening and tomorrow we will continue with the Quarterly PM. Thanks, Linda O -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at snf.stanford.edu Mon Jun 29 16:38:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Jun 2009 16:38:20 -0700 Subject: Comment asml SNF 2009-06-29 16:38:19: System stabilizing Message-ID: System will not come up tonight after all. The system is in a stabilization mode due to the system being open for an extended period of time. ASML will continue PM tomorrow morning. From joho at snf.stanford.edu Tue Jun 30 16:21:41 2009 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Tue, 30 Jun 2009 16:21:41 -0700 Subject: Shutdown asml SNF 2009-06-29 08:08:57: Quarterly PM & Purge hood installation Message-ID: - Completed QPM - OK to use