Problem asml SNF 2009-06-16 21:25:15: system error : abort

riteshj at riteshj at
Tue Jun 16 21:25:16 PDT 2009

It took extremely long (about 5-7 mins) to go from the p-chuck to e-chuck and then the wafre just stopped there. No alignment or anythign happeneing. After 5 mins it aborted saying system error: abort: clear stepper. previous users also experineced this problem. 

More information about the asml-pcs mailing list