Problem asml SNF 2009-05-17 22:36:47: Carrier Inspection Errors and Alignment Marks
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Mon Jun 22 10:11:11 PDT 2009
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Shutdown asml SNF 2009-06-19 14:49:22: Edge sensor problem
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Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed
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System OK
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Shutdown asml SNF 2009-06-19 14:49:22: Edge sensor problem
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Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed
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