Comment asml SNF 2009-05-11 09:35:28: System is down
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Mon Jun 22 10:11:58 PDT 2009
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Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed
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Comment asml SNF 2009-05-22 00:00:41: Output casette chipped
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System OK
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Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed
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Comment asml SNF 2009-05-22 00:00:41: Output casette chipped
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