Problem asml SNF 2009-06-24 14:25:44: 6^ Inch conversion

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jun 24 14:25:44 PDT 2009


The stepper has been converted to 6" wafer size and will remain in 6" until tomorrow afternoon. The stepper is down for 4 inch wafer processing until tomorrow afternoon




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