From gsosa at snf.stanford.edu Mon Mar 2 16:22:57 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 2 Mar 2009 16:22:57 -0800 Subject: Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system Message-ID: There is a wafer stuck on the E-chuck in unknown state. Cannot retrieve wafer through software( System does not sense wafer on E-chuck. Will have FSE remove wafer during PM tomorrow. From gsosa at snf.stanford.edu Tue Mar 3 09:08:46 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Mar 2009 09:08:46 -0800 Subject: Shutdown asml SNF 2009-03-03 09:08:46: Monthly PM in progress Message-ID: ASM-L vendor doing the monthly PM. From gsosa at snf.stanford.edu Tue Mar 3 09:09:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Mar 2009 09:09:43 -0800 Subject: Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system Message-ID: Vendor retrieved the wafer from the E-chuck. From gsosa at snf.stanford.edu Tue Mar 3 15:28:37 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:28:37 -0800 Subject: Shutdown asml SNF 2009-03-03 08:19:07: Message-ID: Vendor started the monthly PM. PM will continue tomorrow. System is up for this evening. From gsosa at snf.stanford.edu Tue Mar 3 15:28:44 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:28:44 -0800 Subject: Shutdown asml SNF 2009-03-03 09:08:46: Monthly PM in progress Message-ID: Vendor started the monthly PM. PM will continue tomorrow. System is up for this evening. From gsosa at snf.stanford.edu Tue Mar 3 15:28:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Mar 2009 15:28:53 -0800 Subject: Problem asml SNF 2009-03-03 08:20:51: can not enable Equipment Actions Message-ID: Vendor started the monthly PM. PM will continue tomorrow. System is up for this evening. From mahnaz at snf.stanford.edu Wed Mar 4 16:49:04 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 4 Mar 2009 16:49:04 -0800 Subject: Problem asml SNF 2009-03-04 16:49:03: particle on chuck Message-ID: We have observed a good size particle on the chuck. With flat toward you the particle is on top left of the wafer. If you have critical work please wait till tomorrow. ASML fse were here but I do not know where the stone is ( we locked it up and apparently I do not have access to it). FSE will be back tomorrow morning. So our bad and i apologize for that. From mahnaz at snf.stanford.edu Thu Mar 5 16:58:05 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 5 Mar 2009 16:58:05 -0800 Subject: Comment asml SNF 2009-03-05 16:58:04: needs more quals Message-ID: ASML needs more testing tomorrow. ASML FSE will have the system from 9 am to 5 pm. From gsosa at snf.stanford.edu Thu Mar 5 17:40:08 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 5 Mar 2009 17:40:08 -0800 Subject: Problem asml SNF 2009-03-05 17:40:07: Non Criticals Only Message-ID: There is still more work that needs to be done on the focus system. There still appears to be some image tilt. We are releasing the tool for non-critical work only and strongly advise to shoot and inspect a test wafer for image quality. Please do not expose any critical work on the stepper. If you do so, it is at your own risk. We cannot garantee optimum tool performance at this time. Vendors will return tomorrow to continue working on problem. From damodei at snf.stanford.edu Thu Mar 5 22:01:22 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Thu, 5 Mar 2009 22:01:22 -0800 Subject: Comment asml SNF 2009-03-05 22:01:21: wafer rejected Message-ID: ASML rejected wafer. Seemed to be an issue with focusing. From gsosa at snf.stanford.edu Fri Mar 6 16:20:53 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Mar 2009 16:20:53 -0800 Subject: Comment asml SNF 2009-03-06 16:20:52: System is Up 3/6/09 Message-ID: Vendors cleaned the E-table and tested with hotspot wafer- Looks good. Vendors checked and adjusted white light focus/tilt., performed red to white light tilt matching and red/blue test. Vendors also did BMC calibrations and edge sensor/mark sensor calibrations. New system reference state defined. IQC tests look good. System is up and ready to use. Please expose and inspect a test wafer if possible to ensure your work. From gsosa at snf.stanford.edu Fri Mar 6 16:22:17 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Mar 2009 16:22:17 -0800 Subject: Problem asml SNF 2009-03-04 16:49:03: particle on chuck Message-ID: Vendors cleaned the E-table and tested with hotspot wafer- Looks good. Vendors checked and adjusted white light focus/tilt., performed red to white light tilt matching and red/blue test. Vendors also did BMC calibrations and edge sensor/mark sensor calibrations. New system reference state defined. IQC tests look good. System is up and ready to use. Please expose and inspect a test wafer if possible to ensure your work. From gsosa at snf.stanford.edu Fri Mar 6 16:22:31 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Mar 2009 16:22:31 -0800 Subject: Comment asml SNF 2009-03-05 16:58:04: needs more quals Message-ID: Vendors cleaned the E-table and tested with hotspot wafer- Looks good. Vendors checked and adjusted white light focus/tilt., performed red to white light tilt matching and red/blue test. Vendors also did BMC calibrations and edge sensor/mark sensor calibrations. New system reference state defined. IQC tests look good. System is up and ready to use. Please expose and inspect a test wafer if possible to ensure your work. From gsosa at snf.stanford.edu Fri Mar 6 16:22:39 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Mar 2009 16:22:39 -0800 Subject: Problem asml SNF 2009-03-05 17:40:07: Non Criticals Only Message-ID: Vendors cleaned the E-table and tested with hotspot wafer- Looks good. Vendors checked and adjusted white light focus/tilt., performed red to white light tilt matching and red/blue test. Vendors also did BMC calibrations and edge sensor/mark sensor calibrations. New system reference state defined. IQC tests look good. System is up and ready to use. Please expose and inspect a test wafer if possible to ensure your work. From lindaohara at snf.stanford.edu Sat Mar 7 18:05:35 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Sat, 7 Mar 2009 18:05:35 -0800 Subject: Comment asml SNF 2009-01-16 08:30:28: Cree Demo Message-ID: done From gsosa at snf.stanford.edu Tue Mar 10 11:12:05 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Mar 2009 11:12:05 -0700 Subject: Shutdown asml SNF 2009-03-10 11:12:05: Lamp change Message-ID: Vendor is doing a scheduled lamp change From gsosa at snf.stanford.edu Tue Mar 10 13:15:29 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 10 Mar 2009 13:15:29 -0700 Subject: Shutdown asml SNF 2009-03-10 11:12:05: Lamp change Message-ID: The lamp change is rescheduled for Thursday(3/12). Vendor worked on the rolling monitor problem and installed an exhaust duct for the stepper main body. System is up and ready to use. From mahnaz at snf.stanford.edu Tue Mar 17 16:41:27 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 17 Mar 2009 16:41:27 -0700 Subject: Comment asml SNF 2009-03-17 16:41:25: lamp change and Lens clean Message-ID: The system will get lamp change tomorrow and an specialist will clean the lens. So this means the ASML will need their time on the tool. From gsosa at snf.stanford.edu Wed Mar 18 09:04:19 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Mar 2009 09:04:19 -0700 Subject: Shutdown asml SNF 2009-03-18 09:04:18: Lamp Change Message-ID: ASM-L is doing a lamp change and cleaning the bottom lens. From gsosa at snf.stanford.edu Wed Mar 18 15:15:24 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 18 Mar 2009 15:15:24 -0700 Subject: Shutdown asml SNF 2009-03-18 09:04:18: Lamp Change Message-ID: Vendors replaced the lamp, cleaned the lower lens and cleaned the E-chuck. Uniformity is at 1.65%. Hotspot test is good. From mahnaz at snf.stanford.edu Fri Mar 20 09:45:24 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 20 Mar 2009 09:45:24 -0700 Subject: Comment asml SNF 2009-03-20 09:45:24: pm Message-ID: ASML will be shut down on March 25th and 26th for level sensor PM. Please note that the system will not be available on these two days. Quarterly pm will be on March 31st and April 1st. The system will be available in the afternoon. From mahnaz at snf.stanford.edu Wed Mar 25 13:39:42 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 25 Mar 2009 13:39:42 -0700 Subject: Shutdown asml SNF 2009-03-25 13:39:42: level sensor work asml FSM Message-ID: From gsosa at snf.stanford.edu Thu Mar 26 16:08:31 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 26 Mar 2009 16:08:31 -0700 Subject: Shutdown asml SNF 2009-03-25 13:39:42: level sensor work asml FSM Message-ID: ASML vendors did a complete level sensor setup, defined red and white light focus and redefined a new system reference state. Checked system with hotspot check. All looks good. . From ericp at snf.stanford.edu Fri Mar 27 00:00:56 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 27 Mar 2009 00:00:56 -0700 Subject: Shutdown asml SNF 2009-03-27 00:00:55: Wafers stuck Message-ID: 3 wafers in total in machine. 1 is in the input cassette. Machine indicates other two are on D-chuck and E-chuck. Wafers were tested on granite. This was a backside alignment. Error message is: "Wafer probably lost in machine. Wafer was expected on inp robot." I did notice something strange. After the machine took the first two wafers, the load arm stayed in the cassette, and didn't grab wafer #3. (Only 3 wafers were requested to be run in the batch). The robot seemed to be looking for a wafer in about slot #10 (??) Software requests a "FAST STARTUP", which results in "Wafer Handler: Failed" Nishant looked at it, and restarted the software, but it ends in the same place: "Wafer probably stuck in machine....". From gsosa at snf.stanford.edu Fri Mar 27 09:26:10 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Mar 2009 09:26:10 -0700 Subject: Shutdown asml SNF 2009-03-27 00:00:55: Wafers stuck Message-ID: Wafers on E-chuck and D-Chuck processed and fully exposed according to batch report. 3rd wafer at input cassette could not be sensed by robot and caused a wafer handling error. Recovered all wafers from system. Inspected suspect wafer. Nothing unusual on back of wafer. Also tested on granite- OK. Had robot pick wafer out of cassette to try and recreate the problem. Also OK- robot picked up wafer OK. Tested system by processing 1 hotspot and 1 E-Zero wafer.System OK. Hotspot wafer looked good. System ready for use. From gsosa at snf.stanford.edu Tue Mar 31 15:14:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 31 Mar 2009 15:14:13 -0700 Subject: Comment asml SNF 2009-03-31 15:14:12: PM Update 033109 Message-ID: Vendors completed 1st phase of quarterly PM. Exposed a hotspot wafer- All OK. Vendors will return tomorrow to complete the quarterly PM. System is up for tonight