Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Mar 2 16:22:57 PST 2009


There is a wafer stuck on the E-chuck in unknown state. Cannot retrieve wafer through software( System does not sense wafer on E-chuck. Will have FSE remove wafer during PM tomorrow.




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