Shutdown asml SNF 2009-03-03 09:08:46: Monthly PM in progress
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Mar 3 09:08:46 PST 2009
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Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system
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Shutdown asml SNF 2009-03-03 09:08:46: Monthly PM in progress
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ASM-L vendor doing the monthly PM.
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Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system
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Shutdown asml SNF 2009-03-03 09:08:46: Monthly PM in progress
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