Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Tue Mar 3 09:09:43 PST 2009
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Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system
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Vendor retrieved the wafer from the E-chuck.
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Shutdown asml SNF 2009-03-02 16:22:56: Wafer stuck in system
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Shutdown asml SNF 2009-03-03 09:08:46: Monthly PM in progress
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