Problem asml SNF 2009-03-04 16:49:03: particle on chuck

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Mar 4 16:49:04 PST 2009


We have observed a good size particle on the chuck.  With flat toward you the particle is on top left of the wafer.
If you have critical work please wait till tomorrow.
ASML fse were here but I  do not know  where the stone is ( we locked it up and apparently I do not have access to it).
FSE will be back tomorrow morning.
So our bad and i apologize for that.




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