Comment asml SNF 2009-03-05 22:01:21: wafer rejected
damodei at snf.stanford.edu
damodei at snf.stanford.edu
Thu Mar 5 22:01:22 PST 2009
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Problem asml SNF 2009-03-05 17:40:07: Non Criticals Only
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ASML rejected wafer. Seemed to be an issue with focusing.
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Problem asml SNF 2009-03-05 17:40:07: Non Criticals Only
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Comment asml SNF 2009-03-06 16:20:52: System is Up 3/6/09
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