Problem asml SNF 2009-03-04 16:49:03: particle on chuck

gsosa at gsosa at
Fri Mar 6 16:22:17 PST 2009

 Vendors cleaned the E-table and tested with hotspot wafer- Looks good. Vendors checked and adjusted white light focus/tilt., performed red to white light tilt matching and red/blue test. Vendors also did BMC calibrations and edge sensor/mark sensor calibrations. New system reference state defined. IQC tests look good. System is up and ready to use. Please expose and inspect a test wafer if possible to ensure your work. 

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