Shutdown asml SNF 2009-03-10 11:12:05: Lamp change

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Mar 10 13:15:29 PDT 2009


The lamp change is rescheduled for Thursday(3/12). Vendor worked on the rolling monitor problem and installed an exhaust duct for the stepper main body. System is up and ready to use.




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