Comment asml SNF 2009-03-17 16:41:25: lamp change and Lens clean

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Mar 17 16:41:27 PDT 2009


The system will get lamp change  tomorrow and an specialist will clean the lens.
So this means the ASML will need their time on the tool.




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