Shutdown asml SNF 2009-03-25 13:39:42: level sensor work asml FSM

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Mar 26 16:08:31 PDT 2009


ASML vendors did a complete level sensor setup, defined red and white light focus and redefined a new system reference state. Checked system with hotspot check. All looks good. . 




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