Shutdown asml SNF 2009-03-27 00:00:55: Wafers stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Mar 27 09:26:10 PDT 2009


Wafers on E-chuck and D-Chuck processed and fully exposed according to batch report. 3rd wafer at input cassette could not be sensed by robot and caused a wafer handling error. Recovered all wafers from system. Inspected suspect wafer. Nothing unusual on back of wafer. Also tested on granite-  OK. Had robot pick wafer out of cassette to try and recreate the problem. Also OK- robot picked up wafer OK. Tested system by processing 1 hotspot and 1 E-Zero wafer.System OK. Hotspot wafer looked good.  System ready for use.




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