From masaharu at snf.stanford.edu Sat May 2 07:40:42 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 2 May 2009 07:40:42 -0700 Subject: Comment asml SNF 2009-05-02 07:40:42: misalignment issue? Message-ID: The last three layers were perfectly aligned. Yesterday, I could also align the 4th layer very fine. However, today, I observed x, y and theta misalignment by 2-5um, three times, for the same wafer. Alignment marks and backside are ultra-clean. From jonathan at snf.stanford.edu Tue May 5 09:01:03 2009 From: jonathan at snf.stanford.edu (jonathan at snf.stanford.edu) Date: Tue, 5 May 2009 09:01:03 -0700 Subject: Shutdown asml SNF 2009-05-05 09:01:03: ASML upgrade shutdown until 5/6/09 PM Message-ID: From mahnaz at snf.stanford.edu Wed May 6 09:17:09 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 May 2009 09:17:09 -0700 Subject: Shutdown asml SNF 2009-05-05 09:01:03: ASML upgrade shutdown until 5/6/09 PM Message-ID: I like to let you know that the hardware purge hood has been install but the fse has detected a small crack in extraction mirror. The part needs to be order from Europe so will take few weeks. Linda has done all the quals, IQC, uniformity and hot spot test . The system is up but still ASML's hours till 2 pm today. Please report any problem you encounter on coral. From mahnaz at snf.stanford.edu Wed May 6 09:18:51 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 May 2009 09:18:51 -0700 Subject: Problem asml SNF 2009-04-26 18:50:13: Wafer Handler Error Message-ID: The system has been reset. so far we do not see any other issues. From mahnaz at snf.stanford.edu Wed May 6 09:19:36 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 May 2009 09:19:36 -0700 Subject: Comment asml SNF 2009-04-25 20:15:31: backside align Message-ID: BMC was checked and correction was made in BMC. Good to go. From mahnaz at snf.stanford.edu Wed May 6 09:20:41 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 May 2009 09:20:41 -0700 Subject: Problem asml SNF 2009-04-26 20:05:50: Wafer Stage Error Message-ID: The system has been tested by now everthing is ok,. From yuhykr at snf.stanford.edu Sun May 10 18:26:20 2009 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Sun, 10 May 2009 18:26:20 -0700 Subject: Shutdown asml SNF 2009-05-10 18:26:20: handling stage error Message-ID: One of my wafers was stuck on the robot arm. Reinitialization attempt was made but was unsuccessful. (Start-up Fast was unsuccessful) From gsosa at snf.stanford.edu Mon May 11 09:35:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 May 2009 09:35:28 -0700 Subject: Comment asml SNF 2009-05-11 09:35:28: System is down Message-ID: Cannot re-initialize the tool. System log reports wafer stage and level sensor problems. Field service comming in to repair. From mahnaz at snf.stanford.edu Mon May 11 13:21:34 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 May 2009 13:21:34 -0700 Subject: Comment asml SNF 2009-05-11 13:21:33: 3"demo Message-ID: I like to let you know that the stepper will be down on May 26th and 27th. Asml needs to do a demo so on Tuesday 26th we will have access to asml till 10:30 am and then the system will switch to 3" and will stay in 3" till 2:30 pm on 27th. In short the system will be unavailable from mid day on 26th till 2:30 on 27th. Please plan accordingly. From gsosa at snf.stanford.edu Mon May 11 15:02:34 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 May 2009 15:02:34 -0700 Subject: Comment asml SNF 2009-05-11 15:02:33: Status Update 5/11/09 Message-ID: The stepper is still down. The vendors troubleshot and detemined that there is a bad power amplifier module for the wafer stage "X" axis. They do not have a part locally. They have ordered one and the new part should be here tomorrow. From gsosa at snf.stanford.edu Tue May 12 11:29:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 May 2009 11:29:43 -0700 Subject: Shutdown asml SNF 2009-05-10 18:26:20: handling stage error Message-ID: Vendor replaced the power amp module for the "X" stage axis. System initialized OK. Daily IQC test performed by vendor. All parameters OK. From gsosa at snf.stanford.edu Wed May 13 10:21:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 13 May 2009 10:21:28 -0700 Subject: Comment asml SNF 2009-05-13 10:21:28: Hotspot 051309 Message-ID: Hotspot on monitor wafer in upper/right quadrant of wafer. Cleaned the E-chuck with cleaning tool. Re-test came out good. From mahnaz at snf.stanford.edu Thu May 14 12:59:39 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 14 May 2009 12:59:39 -0700 Subject: Problem asml SNF 2009-02-19 16:07:18: 3D Caliberation Message-ID: I believe that this has been resolved. From ginel at snf.stanford.edu Fri May 15 06:20:37 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 15 May 2009 06:20:37 -0700 Subject: Problem asml SNF 2009-05-15 06:20:37: dialogue frozen Message-ID: dialogue froze while making changes to my job file... needs to be restarted. From lindaohara at snf.stanford.edu Fri May 15 15:38:38 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 15 May 2009 15:38:38 -0700 Subject: Shutdown asml SNF 2009-05-15 15:38:37: Calibration Message-ID: Convert to 4" and doing calibrations From gsosa at snf.stanford.edu Fri May 15 18:33:22 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 15 May 2009 18:33:22 -0700 Subject: Shutdown asml SNF 2009-05-15 15:38:37: Calibration Message-ID: ASML completed 6" demo. Tool converted back to 4" wafer size. All calibrations completed and in spec. Checked IQC and updated focus( Focus at 116 nanometers). IQC retest looks good. Hotspot wafer looks good. From gsosa at snf.stanford.edu Fri May 15 18:33:38 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 15 May 2009 18:33:38 -0700 Subject: Problem asml SNF 2009-05-15 06:20:37: dialogue frozen Message-ID: Reset system software. From gsosa at snf.stanford.edu Fri May 15 19:21:11 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 15 May 2009 19:21:11 -0700 Subject: Problem asml SNF 2009-05-15 19:21:11: Please shoot test wafer Message-ID: Please expose and inspect a test wafer and verify good alignment before exposing all of your wafers. One user reported a possible misalignment on the order of 1 micron. If at all possible, please take a test wafer and check alignmnet. Report any problems in Coral. From damodei at snf.stanford.edu Sun May 17 22:36:48 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Sun, 17 May 2009 22:36:48 -0700 Subject: Problem asml SNF 2009-05-17 22:36:47: Carrier Inspection Errors and Alignment Marks Message-ID: System intermittently reports carrier inspection errors. When the casette does load, the system can't find any alignment marks. Other users appear to have had similar issues today. From mahnaz at snf.stanford.edu Mon May 18 11:26:40 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 18 May 2009 11:26:40 -0700 Subject: Comment asml SNF 2009-05-18 11:26:39: energy sensor temp. error Message-ID: From gsosa at snf.stanford.edu Mon May 18 12:44:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 May 2009 12:44:13 -0700 Subject: Comment asml SNF 2009-05-18 12:44:12: Hotspot Message-ID: 2 very faint hotspots on monitor wafer in lower/left quadrant near edge. Cleaned the E-chuck. Retest came out good. Verified focus in IQC test- All OK. From jonathan at snf.stanford.edu Wed May 20 07:54:09 2009 From: jonathan at snf.stanford.edu (jonathan at snf.stanford.edu) Date: Wed, 20 May 2009 07:54:09 -0700 Subject: Comment asml SNF 2009-05-20 07:54:09: Stepper 3" Message-ID: Convert to 3" today From gsosa at snf.stanford.edu Wed May 20 15:54:36 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 May 2009 15:54:36 -0700 Subject: Comment asml SNF 2009-05-20 07:54:09: Stepper 3" Message-ID: Tol converted back to 4" . All wafer handling calibrations. completed. hotspot and IQC tests good. From ginel at snf.stanford.edu Thu May 21 01:08:07 2009 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Thu, 21 May 2009 01:08:07 -0700 Subject: Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed Message-ID: One wafer had an issue where the resist seemed underexposed on an outer ring of the wafer... two other wafers were fine without this issue; all resist spun at same time. From damodei at snf.stanford.edu Fri May 22 00:00:42 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Fri, 22 May 2009 00:00:42 -0700 Subject: Comment asml SNF 2009-05-22 00:00:41: Output casette chipped Message-ID: From gsosa at snf.stanford.edu Tue May 26 11:00:13 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 26 May 2009 11:00:13 -0700 Subject: Shutdown asml SNF 2009-05-26 11:00:13: 3" conversion Message-ID: Stepper being converted to 3" wafer size for ASML customer demo. System will be down for 4" wafer processing untill tomorrow afternoon. From gsosa at snf.stanford.edu Wed May 27 14:34:49 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 27 May 2009 14:34:49 -0700 Subject: Shutdown asml SNF 2009-05-26 11:00:13: 3" conversion Message-ID: ASML S/A group completed 3" wafer demo. Tool has been converted back to 4" wafer size. All needed calibrations and checks completed. System ready to use.