Comment asml SNF 2009-05-02 07:40:42: misalignment issue?

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Sat May 2 07:40:42 PDT 2009


The last three layers were perfectly aligned.
Yesterday, I could also align the 4th layer very fine.
However, today, I observed x, y and theta 
misalignment by 2-5um, three times, for the same wafer.
Alignment marks and backside are ultra-clean.




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