Shutdown asml SNF 2009-05-05 09:01:03: ASML upgrade shutdown until 5/6/09 PM

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed May 6 09:17:09 PDT 2009


I like to let you know that the hardware purge hood has been install but the fse has detected a small crack in extraction mirror. The part needs to be order from Europe so will take few weeks.
Linda has done all the quals, IQC, uniformity and hot spot test .
The system is up but still ASML's hours till 2 pm today.
Please report any problem you encounter on coral.




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