Shutdown asml SNF 2009-05-10 18:26:20: handling stage error

yuhykr at snf.stanford.edu yuhykr at snf.stanford.edu
Sun May 10 18:26:20 PDT 2009

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One of my wafers was stuck on the robot arm. Reinitialization attempt was made but was unsuccessful. (Start-up Fast was unsuccessful)

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