Comment asml SNF 2009-05-11 15:02:33: Status Update 5/11/09

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon May 11 15:02:34 PDT 2009


The stepper is still down. The vendors troubleshot and detemined that there is a bad power amplifier module for the wafer stage "X" axis.  They do not have a part locally. They have ordered one and the new part should be here tomorrow.




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