Comment asml SNF 2009-05-11 15:02:33: Status Update 5/11/09

gsosa at gsosa at
Mon May 11 15:02:34 PDT 2009

The stepper is still down. The vendors troubleshot and detemined that there is a bad power amplifier module for the wafer stage "X" axis.  They do not have a part locally. They have ordered one and the new part should be here tomorrow.

More information about the asml-pcs mailing list