Comment asml SNF 2009-05-13 10:21:28: Hotspot 051309

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed May 13 10:21:28 PDT 2009


Hotspot on monitor wafer in upper/right quadrant of wafer. Cleaned the E-chuck with cleaning tool. Re-test came out good. 




More information about the asml-pcs mailing list