Shutdown asml SNF 2009-05-15 15:38:37: Calibration

gsosa at gsosa at
Fri May 15 18:33:22 PDT 2009

ASML completed 6" demo. Tool converted back to 4" wafer size. All calibrations completed and in spec. Checked IQC and updated focus( Focus at 116 nanometers). IQC retest looks good. Hotspot wafer looks good.

More information about the asml-pcs mailing list