Shutdown asml SNF 2009-05-15 15:38:37: Calibration

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 15 18:33:22 PDT 2009


ASML completed 6" demo. Tool converted back to 4" wafer size. All calibrations completed and in spec. Checked IQC and updated focus( Focus at 116 nanometers). IQC retest looks good. Hotspot wafer looks good.




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