Problem asml SNF 2009-05-15 19:21:11: Please shoot test wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 15 19:21:11 PDT 2009


Please expose and inspect a test wafer and verify good alignment before exposing all of your wafers. One user reported a possible misalignment on the order of 1 micron. If at all possible, please take a test wafer and check alignmnet. Report any problems in Coral.




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