Problem asml SNF 2009-05-17 22:36:47: Carrier Inspection Errors and Alignment Marks

damodei at snf.stanford.edu damodei at snf.stanford.edu
Sun May 17 22:36:48 PDT 2009

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System intermittently reports carrier inspection errors.  When the casette does load, the system can't find any alignment marks.  Other users appear to have had similar issues today.

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Next message: Comment asml SNF 2009-05-18 11:26:39: energy sensor temp. error
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