Comment asml SNF 2009-05-18 12:44:12: Hotspot

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon May 18 12:44:13 PDT 2009


2 very faint hotspots on monitor wafer in lower/left quadrant near edge. Cleaned the E-chuck. Retest came out good. Verified focus in IQC test- All OK. 




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