Problem asml SNF 2009-05-21 01:08:07: 1 wafer oddly exposed

ginel at snf.stanford.edu ginel at snf.stanford.edu
Thu May 21 01:08:07 PDT 2009


One wafer had an issue where the resist seemed underexposed on an outer ring of the wafer...  two other wafers were fine without this issue; all resist spun at same time.




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