Shutdown asml SNF 2009-05-26 11:00:13: 3" conversion

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue May 26 11:00:13 PDT 2009


Stepper being converted to 3" wafer size for ASML customer demo. System will be down for 4" wafer processing untill tomorrow afternoon.




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