Shutdown asml SNF 2009-05-26 11:00:13: 3" conversion

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed May 27 14:34:49 PDT 2009


ASML S/A group completed 3" wafer demo. Tool has been converted back to 4" wafer size. All needed calibrations and checks completed. System ready to use.




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