Shutdown asml SNF 2009-11-02 11:29:22: Pre-aligner problems

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 2 11:29:23 PST 2009


System is having issues with the pre-aligner. Logging indicates centering issues or cannot detect the leading or trailing edge of flat. System is down. ASM-L FSE called @ 11.30AM




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