Shutdown asml SNF 2009-11-02 11:29:22: Pre-aligner problems

joho at snf.stanford.edu joho at snf.stanford.edu
Mon Nov 2 14:45:39 PST 2009


Cleaned the Centering Unit and Rotation Unit. Ran Edge Sensor and Mark Sensor Repro tests to check systems Wafer Handling Stability. System is OK to use.
- Joey/Mark




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