Comment asml SNF 2009-11-05 13:00:00: ASML stepper is not OK for Quartz/Glass Wafers

joho at snf.stanford.edu joho at snf.stanford.edu
Thu Nov 5 13:00:00 PST 2009


All, the ASML Stepper is OK for silicon wafers, but not okay for Quartz/Glass wafers. We'll update everyone once the system's capabilities for Quartz/Glass is OK again.
- Joey




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