Shutdown asml SNF 2009-11-05 13:49:59: Misalilgn Wafers on Two Users

joho at snf.stanford.edu joho at snf.stanford.edu
Thu Nov 5 15:27:13 PST 2009


System is OK to use now. Found the "Static Wafer Load Position" out of spec in BMC Wafer Mark Calibration . The value was off about 44 um. Corrected the 44 um error, and verified the systems health is OK.
- Joey




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