Problem asml SNF 2009-11-06 09:40:17: ASML Stepper not okay for Quartz/Glass Wafers

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Nov 6 09:40:18 PST 2009


All, the ASML Stepper is OK for silicon wafers, but not okay for Quartz/Glass wafers. We'll update everyone once the system's capabilities for Quartz/Glass is OK again.
- Joey




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