Shutdown asml SNF 2009-11-16 08:25:04: Lens pressure problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Nov 16 08:25:04 PST 2009


Lens pressure was disrupted ~ 18:00 hours on Sunday due mto a cracked airline that supplies air to the ASML-gas panel to operate the auto switchover valves.  The crack has been repaired and lens pressure restored to the stepper. System will need stabilizing and testing.




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