Comment asml SNF 2009-11-21 16:07:53: Stepper Update 11/21

gsosa at gsosa at
Sat Nov 21 16:07:54 PST 2009

ASML Field service replaced the level sensor motor and did level sensor performance testing. All looks good. Tool will need to stabilize until about 7 or 8 PM this evening. The tool stability will be checked at this time. Based on the stability tests the tool will either be released for use or the tool will remain down for further stabilizing and testing. Please check coral for further updates.

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