Shutdown asml SNF 2009-11-18 13:53:33: Level Sensor Driver Problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Sat Nov 21 21:40:23 PST 2009


Level sensor motor replaced by ASML field service. Performance testing of level sensor very stable and accurate. System has stabilized fully and daily testing looks good. All critical parameters in IQC test in spec. Ran a hotspot test- Wafer looks good( no hotspots, fields look good) . Checked Dose to Clear- Looks good at 51 mj/cm2. System up and ready to use. 




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