Comment asml SNF 2009-11-22 13:45:32: Granite table dirty? adding particles?

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Sun Nov 22 13:45:32 PST 2009


Granite table for flatness check seems to be adding particles.
I tried an acetone wipe but still seems to be adding particles.
Re-clean your wafers after flatness check




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