Comment asml SNF 2009-11-24 17:26:11: ASML Stepper OK to use

joho at snf.stanford.edu joho at snf.stanford.edu
Tue Nov 24 17:26:12 PST 2009


Releasing ASML reservation from 1730 to 1800.
System is in 4in mode. Installed the new Edge Sensor and the system is now OK to run quartz/glass wafers.
- Joey Ho ASML CS Engineer




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