Problem asml SNF 2009-11-11 13:09:17: ASML Stepper not ok for Glass/Quartz Wafers

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Nov 25 15:35:54 PST 2009


Installed the new Edge Sensor and the system is now OK to run quartz/glass wafers.
- Joey Ho ASML CS Engineer




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