Problem asml SNF 2009-09-30 18:31:50: Wafers Stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 1 09:39:14 PDT 2009


Manually removed stranded wafers from E-chuck, Prealigner and Dipod.  Wafer loaded to E-chuck had either a E-pins vucuum or E-table clamping error which halted processing. Cleaned the E-chuck with cleaning stone. Visual inspection indicates residue on back of suspect wafer and wafers do not float, doing the granite test. Also, we could only account for wafers #2, #3, and #4. Where did wafer #1 go?  Was it removed from the system?  




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