Shutdown asml SNF 2009-10-01 09:44:27: Purge hood install 10/1
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Thu Oct 1 09:44:27 PDT 2009
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Problem asml SNF 2009-09-30 18:31:50: Wafers Stuck
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Shutdown asml SNF 2009-10-01 09:44:27: Purge hood install 10/1
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Field service completing install of purge hood upgrade.
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Problem asml SNF 2009-09-30 18:31:50: Wafers Stuck
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Shutdown asml SNF 2009-10-01 09:44:27: Purge hood install 10/1
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